Use of Ti(dpm)2(OprI)2 precursor to obtain TiO2 films | - CCMAR -

Conference Proceedings

TitleUse of Ti(dpm)2(OprI)2 precursor to obtain TiO2 films
Publication TypeConference Proceedings
Year of Publication2000
AuthorsV.V., K, A.E., T, I.K., I, V.G., B, Khmelinskii, IV, R.J.F., P
Conference Name- Proceedings of the XVth International Symposium on Chemical Vapour Deposition, Canada, Toronto
CCMAR Authors